Erratum: 'Early nitriding stage of evaporated-Ti thin films by N-ion implantation' [J. Vac. Sci. Technol. A 15, 1848 (1997)].

Details

Language :

English

ISSN :

07342101

Volume :

16

Issue :

1

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films

Publication Type :

Academic Journal

Accession number :

74334599

Full Text :

https://doi.org/10.1116/1.580972