Adsorption and decomposition of dichlorosilane on porous silicon surfaces.

Authors :: Robinson, M. B.
Dillon, A. C.
George, S. M.
Source :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1995, Vol. 13 Issue 1, p35-41, 7p
Publication Year :: 1995

Language :: English
ISSN :: 07342101
Volume :: 13
Issue :: 1
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :: Academic Journal
Accession number :: 74333014
Full Text :: https://doi.org/10.1116/1.579440