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Compact electron cyclotron resonance ion source with a permanent magnet.
- Source :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1993, Vol. 11 Issue 4, p1313-1316, 4p
- Publication Year :
- 1993
Details
- Language :
- English
- ISSN :
- 07342101
- Volume :
- 11
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
- Publication Type :
- Academic Journal
- Accession number :
- 74332231
- Full Text :
- https://doi.org/10.1116/1.578545