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The origins and elimination of oval defects in GaAs layers grown by molecular beam epitaxy.

Authors :
Takahashi, Kazue
Kawada, Hiroki
Ueda, Shinjiro
Furuse, Muneo
Shirayone, Shigeru
Source :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1991, Vol. 9 Issue 3, p854-857, 4p
Publication Year :
1991

Details

Language :
English
ISSN :
07342101
Volume :
9
Issue :
3
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :
Academic Journal
Accession number :
74331041
Full Text :
https://doi.org/10.1116/1.577329