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Growth of microprojections arising from sputter etching of Cu-Ag sandwich.

Authors :
Tanemura, M.
Okuyama, F.
Source :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1986, Vol. 4 Issue 5, p2369-2372, 4p
Publication Year :
1986

Details

Language :
English
ISSN :
07342101
Volume :
4
Issue :
5
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :
Academic Journal
Accession number :
74328215
Full Text :
https://doi.org/10.1116/1.574078