A large aluminum alloy molecular beam epitaxy chamber with an ultimate pressure of 7.5×10-12 Torr.

Details

Language :

English

ISSN :

07342101

Volume :

3

Issue :

6

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films

Publication Type :

Academic Journal

Accession number :

74327654

Full Text :

https://doi.org/10.1116/1.572890