Back to Search Start Over

Homogeneous chemical vapor deposition.

Authors :
Scott, B. A.
Olbricht, W. L.
Meyerson, B. A.
Reimer, J. A.
Wolford, D. J.
Source :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1984, Vol. 2 Issue 2, p450-456, 7p
Publication Year :
1984

Details

Language :
English
ISSN :
07342101
Volume :
2
Issue :
2
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :
Academic Journal
Accession number :
74327246
Full Text :
https://doi.org/10.1116/1.572364