Conducting polyanilines: Discharge layers for electron-beam lithography.

Authors :: Angelopoulos, Marie
Shaw, Jane M.
Kaplan, Richard D.
Perreault, Stanley
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1989, Vol. 7 Issue 6, p1519-1523, 5p
Publication Year :: 1989

Language :: English
ISSN :: 0734211X
Volume :: 7
Issue :: 6
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena
Publication Type :: Academic Journal
Accession number :: 74326168
Full Text :: https://doi.org/10.1116/1.584524