A simplified silylation process.

Authors :: Shaw, Jane M.
Hatzakis, Michael
Babich, Edward D.
Paraszczak, Jurij R.
Witman, David F.
Stewart, Kevin J.
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1989, Vol. 7 Issue 6, p1709-1716, 8p
Publication Year :: 1989

Language :: English
ISSN :: 0734211X
Volume :: 7
Issue :: 6
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena
Publication Type :: Academic Journal
Accession number :: 74326136
Full Text :: https://doi.org/10.1116/1.584444