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Growth condition studies of pseudomorphic InGaAs/GaAs strained layer structures and InGaAs/AlGaAs high electron mobility transistor layer properties.

Authors :
Weng, Shang-Lin
Webb, C.
Eckstein, J. N.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1989, Vol. 7 Issue 2, p361-364, 4p
Publication Year :
1989

Details

Language :
English
ISSN :
0734211X
Volume :
7
Issue :
2
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena
Publication Type :
Academic Journal
Accession number :
74325867
Full Text :
https://doi.org/10.1116/1.584751