A theoretical study of the epitaxial growth of metal overlayers on semiconductor surfaces.

MLA

Batra, Inder P., and S. Ciraci. “A Theoretical Study of the Epitaxial Growth of Metal Overlayers on Semiconductor Surfaces.” Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena, vol. 2, no. 3, July 1984, pp. 427–32. EBSCOhost, https://doi.org/10.1116/1.582889.

APA

Batra, I. P., & Ciraci, S. (1984). A theoretical study of the epitaxial growth of metal overlayers on semiconductor surfaces. Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena, 2(3), 427–432. https://doi.org/10.1116/1.582889

Chicago

Batra, Inder P., and S. Ciraci. 1984. “A Theoretical Study of the Epitaxial Growth of Metal Overlayers on Semiconductor Surfaces.” Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena 2 (3): 427–32. doi:10.1116/1.582889.