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Improvement of the inverted GaAs/AlGaAs heterointerface.

Authors :
Fischer, R.
Masselink, W. T.
Sun, Y. L.
Drummond, T. J.
Chang, Y. C.
Klein, M. V.
MorkoƧ, H.
Anderson, E.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1984, Vol. 2 Issue 2, p170-174, 5p
Publication Year :
1984

Details

Language :
English
ISSN :
0734211X
Volume :
2
Issue :
2
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena
Publication Type :
Academic Journal
Accession number :
74324306
Full Text :
https://doi.org/10.1116/1.582770