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In-lens deflection system with nonequisectored-type multipole electrostatic deflectors.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1983, Vol. 1 Issue 4, p1289-1292, 4p
- Publication Year :
- 1983
Details
- Language :
- English
- ISSN :
- 0734211X
- Volume :
- 1
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena
- Publication Type :
- Academic Journal
- Accession number :
- 74324194
- Full Text :
- https://doi.org/10.1116/1.582731