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High performance 100 mm-in-diameter true zero-order waveplates fabricated by imprint lithography.

Authors :
Wang, Jian Jim
Deng, Xuegong
Liu, Feng
Chen, Lei
Nikolov, Anguel
Liu, Xiaoming
Deng, Jiandong
Sciortino, Paul
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 6, p2950-2953, 4p
Publication Year :
2005

Details

Language :
English
ISSN :
10711023
Volume :
23
Issue :
6
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
74323390
Full Text :
https://doi.org/10.1116/1.2062430