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Evaluation of atomic exchange in GaAs/GaP interfaces by tetragonal distortion measurements.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2004, Vol. 22 Issue 6, p2673-2679, 7p
- Publication Year :
- 2004
Details
- Language :
- English
- ISSN :
- 10711023
- Volume :
- 22
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
- Publication Type :
- Academic Journal
- Accession number :
- 74322921
- Full Text :
- https://doi.org/10.1116/1.1819924