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Evaluation of atomic exchange in GaAs/GaP interfaces by tetragonal distortion measurements.

Authors :
Ferrer, J. C.
Peiró, F.
Cornet, A.
Armelles, G.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2004, Vol. 22 Issue 6, p2673-2679, 7p
Publication Year :
2004

Details

Language :
English
ISSN :
10711023
Volume :
22
Issue :
6
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
74322921
Full Text :
https://doi.org/10.1116/1.1819924