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Investigation of the NO2 sensitivity properties of multiwalled carbon nanotubes prepared by plasma enhanced chemical vapor deposition.

Authors :
Valentini, L.
Cantalini, C.
Armentano, I.
Kenny, J. M.
Lozzi, L.
Santucci, S.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 5, p1996-2000, 5p
Publication Year :
2003

Details

Language :
English
ISSN :
10711023
Volume :
21
Issue :
5
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
74322108
Full Text :
https://doi.org/10.1116/1.1599858