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Analysis of the SiO2/Si3N4 passivation bilayer thickness on the rectifier behavior of AlGaN/GaN HEMTs on (111) silicon substrate.

Authors :
Mattalah, M.
Soltani, A.
Gerbedoen, J.-C.
Ahaitouf, Az.
Defrance, N.
Cordier, Y.
De Jaeger, J.-C.
Source :
Physica Status Solidi (C); Mar2012, Vol. 9 Issue 3/4, p1083-1087, 5p
Publication Year :
2012

Details

Language :
English
ISSN :
18626351
Volume :
9
Issue :
3/4
Database :
Complementary Index
Journal :
Physica Status Solidi (C)
Publication Type :
Academic Journal
Accession number :
73760499
Full Text :
https://doi.org/10.1002/pssc.201100211