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Dual implantation of Ga and Ge into GaAs.

Authors :
Pedrotti, F. L.
Yeo, Y. K.
Ehret, J. E.
Park, Y. S.
Source :
Journal of Applied Physics; Nov1980, Vol. 51 Issue 11, p5781-5784, 4p
Publication Year :
1980

Details

Language :
English
ISSN :
00218979
Volume :
51
Issue :
11
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
73405100
Full Text :
https://doi.org/10.1063/1.327533