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Observations on the hexagonal form of MoSi2 and WSi2 films produced by ion implantation and on related snowplow effects.

Authors :
d'Heurle, F. M.
Petersson, C. S.
Tsai, M. Y.
Source :
Journal of Applied Physics; Nov1980, Vol. 51 Issue 11, p5976-5980, 5p
Publication Year :
1980

Details

Language :
English
ISSN :
00218979
Volume :
51
Issue :
11
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
73405071
Full Text :
https://doi.org/10.1063/1.327517