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Epitaxial growth of Al on Si(111) and Si(100) by ionized-cluster beam.

Authors :
Yamada, I.
Inokawa, H.
Takagi, T.
Source :
Journal of Applied Physics; Nov1984, Vol. 56 Issue 10, p2746-2750, 5p
Publication Year :
1984

Details

Language :
English
ISSN :
00218979
Volume :
56
Issue :
10
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
73372396
Full Text :
https://doi.org/10.1063/1.333805