Preparation of thick YBa[sub 2]Cu[sub 3]O[sub 7-δ] films by dc magnetron sputtering.

High-temperature superconducting films up to 3.6 µm thick were obtained and their properties requisite for the development of microwave devices were investigated. It is shown that YBa[sub 2]Cu[sub 3]O[sub 7 - δ] films of thickness exceeding 3- 5 λ[sub L] may be obtained for use in the microwave range. [ABSTRACT FROM AUTHOR]