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Microwave characterization of YBaCuO thin films grown in situ by Off-axis magnetron sputtering.
- Source :
- Il Nuovo Cimento della Societa Italiana di Fisica: D; 1994, Vol. 16 Issue 12, p2005-2010, 6p
- Publication Year :
- 1994
-
Abstract
- Superconducting films of YBaCuO were deposited in situ on LaAlO substrates using single-target 90° off-axis sputtering. The obtained films have tipical T values of 91K. Surface resistance measurements on as-grown films reach 1.1 mΩ at 77K and 10GHz; whilst on ion-etched patterned resonant lines R (77K, 10GHz) it is about 10mΩ. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 03926737
- Volume :
- 16
- Issue :
- 12
- Database :
- Complementary Index
- Journal :
- Il Nuovo Cimento della Societa Italiana di Fisica: D
- Publication Type :
- Academic Journal
- Accession number :
- 73017770
- Full Text :
- https://doi.org/10.1007/BF02471859