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Interface effects in the formation of silicon oxide on metal silicide layers over silicon substrates.

Authors :
Baglin, J. E. E.
d'Heurle, F. M.
Petersson, C. S.
Source :
Journal of Applied Physics; Apr1983, Vol. 54 Issue 4, p1849-1854, 6p
Publication Year :
1983

Details

Language :
English
ISSN :
00218979
Volume :
54
Issue :
4
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
72870597
Full Text :
https://doi.org/10.1063/1.332821