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Deep level profiles in boron implanted n-Si.

Authors :
Qin, Guo-Gang
Li, Ming-Fu
Sah, Chih-Tang
Source :
Journal of Applied Physics; Jul1982, Vol. 53 Issue 7, p4800-4811, 12p
Publication Year :
1982

Details

Language :
English
ISSN :
00218979
Volume :
53
Issue :
7
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
72869761
Full Text :
https://doi.org/10.1063/1.331354