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Time evolution of developed contours in poly-(methyl methacrylate) electron resist.
- Source :
- Journal of Applied Physics; Dec1974, Vol. 45 Issue 12, p5264-5268, 5p
- Publication Year :
- 1974
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 45
- Issue :
- 12
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 72862026
- Full Text :
- https://doi.org/10.1063/1.1663227