Verification of carrier density profiles derived from spreading resistance measurements by comparing measured and calculated sheet resistance values.

Details

Language :

English

ISSN :

0094243X

Volume :

449

Issue :

1

Database :

Complementary Index

Journal :

AIP Conference Proceedings

Publication Type :

Conference

Accession number :

72855045

Full Text :

https://doi.org/10.1063/1.56799