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Stress evolution during stress migration and electromigration in passivated interconnect lines.
- Source :
- AIP Conference Proceedings; Jun1994, Vol. 305 Issue 1, p231-253, 23p
- Publication Year :
- 1994
Details
- Language :
- English
- ISSN :
- 0094243X
- Volume :
- 305
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- AIP Conference Proceedings
- Publication Type :
- Conference
- Accession number :
- 72845437
- Full Text :
- https://doi.org/10.1063/1.45694