Plasma diagnostics during off-axis magnetron sputtering of Y1Ba2Cu3O7 single target; the abnormal relation between target self-bias voltage and RF power.

Details

Language :

English

ISSN :

0094243X

Volume :

200

Issue :

1

Database :

Complementary Index

Journal :

AIP Conference Proceedings

Publication Type :

Conference

Accession number :

72839978

Full Text :

https://doi.org/10.1063/1.39033