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Crystallization of amorphous silicides by energy beam annealing.

Authors :
Tan, T. Y.
Tsu, R.
Ho, P. S.
Tu, K. N.
Source :
AIP Conference Proceedings; Apr1979, Vol. 50 Issue 1, p533-538, 6p
Publication Year :
1979

Details

Language :
English
ISSN :
0094243X
Volume :
50
Issue :
1
Database :
Complementary Index
Journal :
AIP Conference Proceedings
Publication Type :
Conference
Accession number :
72822380
Full Text :
https://doi.org/10.1063/1.31712