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Effect of non-uniform electron energy distribution function on plasma production in large arc driven negative ion source.

Authors :
Shibata, T.
Koga, S.
Terasaki, R.
Inoue, T.
Dairaku, M.
Kashiwagi, M.
Taniguchi, M.
Tobari, H.
Tsuchida, K.
Umeda, N.
Watanabe, K.
Hatayama, A.
Source :
Review of Scientific Instruments; Feb2012, Vol. 83 Issue 2, p02A719, 3p, 1 Diagram, 1 Chart, 3 Graphs
Publication Year :
2012

Abstract

Spatially non-uniform electron energy distribution function (EEDF) in an arc driven negative ion source (JAEA 10A negative ion source: 10 A NIS) is calculated numerically by a three-dimensional Monte Carlo kinetic model for electrons to understand spatial distribution of plasma production (such as atomic and ionic hydrogen (H0/H+) production) in source chamber. The local EEDFs were directly calculated from electron orbits including electromagnetic effects and elastic/inelastic collision forces. From the EEDF, spatial distributions of H0/H+ production rate were obtained. The results suggest that spatial non-uniformity of H0/H+ productions is enhanced by high energy component of EEDF. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00346748
Volume :
83
Issue :
2
Database :
Complementary Index
Journal :
Review of Scientific Instruments
Publication Type :
Academic Journal
Accession number :
72107505
Full Text :
https://doi.org/10.1063/1.3673485