Comparison of range and range straggling of implanted 10B and 11B in silicon.

Details

Language :

English

ISSN :

00036951

Volume :

30

Issue :

8

Database :

Complementary Index

Journal :

Applied Physics Letters

Publication Type :

Academic Journal

Accession number :

71737243

Full Text :

https://doi.org/10.1063/1.89419