Evaluation of secondary ion mass spectrometry profile distortions using Rutherford backscattering.

Details

Language :

English

ISSN :

00036951

Volume :

39

Issue :

12

Database :

Complementary Index

Journal :

Applied Physics Letters

Publication Type :

Academic Journal

Accession number :

71386301

Full Text :

https://doi.org/10.1063/1.92640