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Dynamic range of 106 in depth profiling using secondary-ion mass spectrometry.

Authors :
Wittmaack, K.
Clegg, J. B.
Source :
Applied Physics Letters; 1980, Vol. 37 Issue 3, p285-287, 3p
Publication Year :
1980

Details

Language :
English
ISSN :
00036951
Volume :
37
Issue :
3
Database :
Complementary Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
71384264
Full Text :
https://doi.org/10.1063/1.91908