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Laser-induced chemical vapor deposition of polycrystalline Si from SiCl4.
- Source :
- Applied Physics Letters; 1980, Vol. 36 Issue 11, p930-932, 3p
- Publication Year :
- 1980
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 36
- Issue :
- 11
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 71383946
- Full Text :
- https://doi.org/10.1063/1.91377