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Laser-induced chemical vapor deposition of polycrystalline Si from SiCl4.

Authors :
Baranauskas, V.
Mammana, C. I. Z.
Klinger, R. E.
Greene, J. E.
Source :
Applied Physics Letters; 1980, Vol. 36 Issue 11, p930-932, 3p
Publication Year :
1980

Details

Language :
English
ISSN :
00036951
Volume :
36
Issue :
11
Database :
Complementary Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
71383946
Full Text :
https://doi.org/10.1063/1.91377