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cw laser-annealing behavior of Se+-implanted InP investigated by ellipsometry.

Authors :
Mizuta, M.
Merz, J. L.
Source :
Applied Physics Letters; 1983, Vol. 43 Issue 4, p375-377, 3p
Publication Year :
1983

Details

Language :
English
ISSN :
00036951
Volume :
43
Issue :
4
Database :
Complementary Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
71379095
Full Text :
https://doi.org/10.1063/1.94349