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Carbon monoxide detection sensitivity of ZnO nanorod-gated AlGaN/GaN high electron mobility transistors in different temperature environments.

Authors :
Lo, Chien-Fong
Liu, Lu
Chu, Byung-Hwan
Ren, Fan
Pearton, Stephen J.
Doré, Sylvain
Hsu, Chien-Hsing
Kim, Jihyun
Dabiran, Amir M.
Chow, Peter P.
Source :
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jan2012, Vol. 30 Issue 1, p010606, 4p
Publication Year :
2012

Abstract

The effect of ambient temperature on the detection sensitivity of carbon monoxide (CO) using ZnO nanorod-gated AlGaN/GaN high electron mobility transistor (HEMT) sensors was studied over a range of temperatures from 25 to 400 °C. An increase of the HEMT drain current was observed for exposure to the CO-containing ambients, due to chemisorbed oxygen on the ZnO surface reacting with CO to form CO2 and releasing electrons to the oxide surface, increasing the counter charges in the two-dimensional electron gas channel of the HEMT. By increasing the detection temperature from 25 °C to 150 °C, the CO detection sensitivity, ΔI/I, and detection limit were significantly improved from 0.23% to 7.5% and from 100 ppm to ∼30 ppm, respectively. However, the sensitivity of the CO detection was degraded by the decrease of mobility and saturation drain current of HEMT at temperatures higher than 200 °C. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
21662746
Volume :
30
Issue :
1
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
Publication Type :
Academic Journal
Accession number :
70565969
Full Text :
https://doi.org/10.1116/1.3672010