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Self-consistent non-linear radio-frequency wave propagation and peripheral plasma biasing.
- Source :
- AIP Conference Proceedings; 12/23/2011, Vol. 1406 Issue 1, p211-214, 4p
- Publication Year :
- 2011
-
Abstract
- This paper treats self-consistently the interplay between slow magnetosonic wave penetration and edge plasma DC biasing using a two-field fluid approach. The RF and DC parts are coupled by non-linear RF and DC sheath boundary conditions at lateral boundaries of the simulation domain. Within this approach two mechanisms of RF-induced DC current flows are outlined, depending on the toroidal symmetry of the RF drive. The numerical implementation of the model using COMSOL, its validation against explicit simplified solutions and its planned improvements are discussed. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 0094243X
- Volume :
- 1406
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- AIP Conference Proceedings
- Publication Type :
- Conference
- Accession number :
- 70097133
- Full Text :
- https://doi.org/10.1063/1.3664962