Morphology and structure of ZnO films synthesized by off-axis sputtering deposition.

MLA

Zhu, Shen, et al. “Morphology and Structure of ZnO Films Synthesized by Off-Axis Sputtering Deposition.” Proceedings of SPIE, no. 1, Nov. 1999, pp. 218–24. EBSCOhost, https://doi.org/10.1117/12.351280.

APA

Zhu, S., Su, C.-H., Lehoczky, S. L., & George, M. A. (1999). Morphology and structure of ZnO films synthesized by off-axis sputtering deposition. Proceedings of SPIE, 1, 218–224. https://doi.org/10.1117/12.351280

Chicago

Zhu, Shen, Ching-Hua Su, Sandor L. Lehoczky, and Michael A. George. 1999. “Morphology and Structure of ZnO Films Synthesized by Off-Axis Sputtering Deposition.” Proceedings of SPIE, no. 1 (November): 218–24. doi:10.1117/12.351280.