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Monolithic integration of GaAs optoelectronic devices using thermal oxide isolation (TOI).

Authors :
Wheeler, Charles B.
Daryanani, Sonu L.
Shen, Jun
Zhang, YongHang
Source :
Proceedings of SPIE; Nov1997, Issue 1, p75-84, 10p
Publication Year :
1997

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65881520
Full Text :
https://doi.org/10.1117/12.271068