Amorphous silicon nitride binary-phase optical elements.

MLA

Huang, Xinfan, et al. “Amorphous Silicon Nitride Binary-Phase Optical Elements.” Proceedings of SPIE, no. 1, Nov. 1994, pp. 193–97. EBSCOhost, https://doi.org/10.1117/12.190750.

APA

Huang, X., Gao, W., Li, Z., Gu, X., Zhou, J., & Chen, K.-J. (1994). Amorphous silicon nitride binary-phase optical elements. Proceedings of SPIE, 1, 193–197. https://doi.org/10.1117/12.190750

Chicago

Huang, Xinfan, Wenqi Gao, Zhifeng Li, Xiaofeng Gu, Jin Zhou, and Kun-Ji Chen. 1994. “Amorphous Silicon Nitride Binary-Phase Optical Elements.” Proceedings of SPIE, no. 1 (November): 193–97. doi:10.1117/12.190750.