Back to Search
Start Over
Versatile DUV scatterometer of the PTB and FEM based analysis for mask metrology.
- Source :
- Proceedings of SPIE; Nov2008, Issue 1, p692207-692207-10, 10p
- Publication Year :
- 2008
Details
- Language :
- English
- ISSN :
- 0277786X
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 65782208
- Full Text :
- https://doi.org/10.1117/12.772619