Improved dimension and shape metrology with versatile atomic force microscopy.

MLA

Caldwell, Mark, et al. “Improved Dimension and Shape Metrology with Versatile Atomic Force Microscopy.” Proceedings of SPIE, no. 1, Nov. 2007, p. 65181L–65181L–10. EBSCOhost, https://doi.org/10.1117/12.708813.

APA

Caldwell, M., Bao, T., Hackenberg, J., McLain, B., Munoz, O., Stephens, T., & Vartanian, V. (2007). Improved dimension and shape metrology with versatile atomic force microscopy. Proceedings of SPIE, 1, 65181L–65181L–10. https://doi.org/10.1117/12.708813

Chicago

Caldwell, Mark, Tianming Bao, John Hackenberg, Brian McLain, Omar Munoz, Tab Stephens, and Victor Vartanian. 2007. “Improved Dimension and Shape Metrology with Versatile Atomic Force Microscopy.” Proceedings of SPIE, no. 1 (November): 65181L–65181L–10. doi:10.1117/12.708813.