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Simultaneous measurements of thin-film thickness and refractive index by dispersive white-light interferometry.

Authors :
Ghim, Young-Sik
You, Joonho
Kim, Seung-Woo
Source :
Proceedings of SPIE; Nov2007, Issue 1, p667402-667402-8, 8p
Publication Year :
2007

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65748852
Full Text :
https://doi.org/10.1117/12.732311