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The integration of optical thin film filters by hydrofluoric acid bonding.

Authors :
Chen, L.
Kintaka, K.
Nishimura, H.
Fukumi, K.
Nishii, J.
Hirao, K.
Source :
Proceedings of SPIE; Nov2006, Issue 1, p614906-614906-7, 7p
Publication Year :
2006

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65736147
Full Text :
https://doi.org/10.1117/12.674193