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Microassembly of 3D micromirrors as building elements for optical MEMS switching.

Microassembly of 3D micromirrors as building elements for optical MEMS switching.

Authors :
Dechev, Nikolai
Basha, Mohamed
Chaudhuri, Sujeet K.
Safavi-Naeini, Safieddin
Source :
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p63760C-63760C-12, 12p
Publication Year :
2006

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65724808
Full Text :
https://doi.org/10.1117/12.686579