Back to Search
Start Over
Impact of long-period line-edge roughness (LER) on accuracy in CD measurement.
- Source :
- Proceedings of SPIE; Nov2005, Issue 1, p1362-1370, 9p
- Publication Year :
- 2005
Details
- Language :
- English
- ISSN :
- 0277786X
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 65713796
- Full Text :
- https://doi.org/10.1117/12.602674