Understanding and reduction of defects on finished EUV masks.

MLA

Liang, Ted, et al. “Understanding and Reduction of Defects on Finished EUV Masks.” Proceedings of SPIE, no. 1, Nov. 2005, pp. 654–62. EBSCOhost, https://doi.org/10.1117/12.604717.

APA

Liang, T., Sanchez, P., Zhang, G., Shu, E., Nagpal, R., & Stivers, A. (2005). Understanding and reduction of defects on finished EUV masks. Proceedings of SPIE, 1, 654–662. https://doi.org/10.1117/12.604717

Chicago

Liang, Ted, Peter Sanchez, Guojing Zhang, Emily Shu, Rajesh Nagpal, and Alan Stivers. 2005. “Understanding and Reduction of Defects on Finished EUV Masks.” Proceedings of SPIE, no. 1 (November): 654–62. doi:10.1117/12.604717.