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Improved optical linewidth measurement by means of alternating dark field illumination and model-based evaluation.

Authors :
Ehret, Gerd
Bodermann, Bernd
Mirande, Werner
Source :
Proceedings of SPIE; Nov2005, Issue 1, p367-376, 10p
Publication Year :
2005

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65708393
Full Text :
https://doi.org/10.1117/12.612460