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Optical properties of crystalline Al203 thin films grown by atomic layer deposition.

Authors :
Aarik, Jaan
Kasikov, Aarne
Kirm, Marco
Lange, Sven
Uustare, Teet
Mändar, Hugo
Source :
Proceedings of SPIE; Nov2005 Part 2, Issue 1, p594601-594601-10, 10p
Publication Year :
2005

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65705282
Full Text :
https://doi.org/10.1117/12.639047