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Integrated reflectance for monitoring silicon oxynitride antireflective coatings on a CVD cluster tool.

Integrated reflectance for monitoring silicon oxynitride antireflective coatings on a CVD cluster tool.

Authors :
Holden, James M.
McGahan, William A.
Seamons, Martin J.
Source :
Proceedings of SPIE; Nov2000 Part 2, Issue 1, p370-378, 9p
Publication Year :
2000

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65696209
Full Text :
https://doi.org/10.1117/12.386493